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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 저자: 안경환 ]
No. Article
1 HWAHAK KONGHAK, 31 (4), pp.378-387 (1993)
TiN 박막 제조를 위한 PECVD 공정의 모사화 연구
Simulation Study of PECVD for TiN Thin Films
안경환, 설용건, 김선효