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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 저자: 박상규 ]
No. Article
1 HWAHAK KONGHAK, 32 (2), pp.121-132 (1994)
저압화학증착공정에성의 텅스텐 박막의 층덮힘에 관한 실험 및 이론적 연구
Experimental and Theoretical Study of Step Coverage in LPCVD of Tungsten
박상규, 윤종호, 이시우