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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 저자: 권오중 ]
No. Article
1 Korean Chemical Engineering Research, 47 (2), pp.141-149 (2009)
구리 및 은 금속 배선을 위한 전기화학적 공정
Electrochemical Metallization Processes for Copper and Silver Metal Interconnection
권오중, 조성기, 김재정