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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 저자: 권성구 ]
No. Article
1 HWAHAK KONGHAK, 31 (6), pp.675-682 (1993)
CF4/O2 식각 가스계를 사용한 텅스텐 박막의 건식 식각 연구
Dry Etching of Tungsten Films in CF4/O2 Gas System
권성구, 남철우, 우성일