About The Journal
  Aims and Scope
  Editorial Board
  Submit a Manuscript 
  Subscription Information
Articles & Issues
  Issue
  Search
For Authors
  Instructions to Authors
  Ethics in Publishing
  Peer Review Process
  Author's Checklist
  Copyright Transfer Form
Contact us
 
 
 
 
Issue
Total 1 articles [ 키워드: Supercritical Cleaning ]
No. Article
1 Korean Chemical Engineering Research, 43 (1), pp.27-32 (2005)
공용매로 변형된 초임계 이산화탄소를 이용한 이온 주입 포토레지스트 세정
Stripping of Ion-Implanted Photoresist Using Cosolvent-Modified Supercritical Carbon Dioxide
정인일, 김주원, 이상윤, et al.