Korean Chem. Eng. Res.
Print:
ISSN 0304-128X
Online:
ISSN 2233-9558
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Issue
Total
2
articles [
키워드
:
Remote Plasma
]
No.
Article
1
Korean Chemical Engineering Research
,
46
(2), pp.408-413 (2008)
저압급속열산화법과 플라즈마확산산화법에 의한 실리콘 산화박막의 제조
Fabrication of Ultrathin Silicon Oxide Layer by Low Pressure Rapid Thermal Oxidation and Remote Plasma Oxidation
고천광, 이원규
2
Korean Chemical Engineering Research
,
44
(5), pp.483-488 (2006)
Remote 플라즈마에서 위치 및 반응기체에 따른 PMMA의 식각 특성 분석
Influence of Loading Position and Reaction Gas on Etching Characteristics of PMMA in a Remote Plasma System
고천광, 이원규
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