Korean Chem. Eng. Res.
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ISSN 0304-128X
Online:
ISSN 2233-9558
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Issue
Total
1
articles [
키워드
:
Post etch residue
]
No.
Article
1
Korean Chemical Engineering Research
,
59
(4), pp.632-638 (2021)
아민과 카르복실산이 함유된 수계용액의 구리 배선 공정의 세정특성
Cleaning Behavior of Aqueous Solution Containing Amine or Carboxylic Acid in Cu-interconnection Process
고천광, 이원규
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