Korean Chem. Eng. Res.
Print:
ISSN 0304-128X
Online:
ISSN 2233-9558
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Issue
Total
1
articles [
키워드
:
PECVD SiO2
]
No.
Article
1
Korean Chemical Engineering Research
,
46
(2), pp.389-396 (2008)
고온 열순환 공정이 BCB와 PECVD 산화규소막 계면의 본딩 결합력에 미치는 영향에 대한 연구
A Study on the Effects of High Temperature Thermal Cycling on Bond Strength at the Interface between BCB and PECVD SiO2 Layers
권용재, 석종원, Lu JQ, et al.
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