Korean Chem. Eng. Res.
Print:
ISSN 0304-128X
Online:
ISSN 2233-9558
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Issue
Total
2
articles [
키워드
:
Damascene Process
]
No.
Article
1
Korean Chemical Engineering Research
,
53
(4), pp.517-523 (2015)
중성 영역 구리 화학적 기계적 평탄화 공정에서의 작용기에 따른 부식방지제의 영향성 연구
Study on the Effects of Corrosion Inhibitor According to the Functional Groups for Cu Chemical Mechanical Polishing in Neutral Environment
이상원, 김재정
2
Korean Chemical Engineering Research
,
52
(1), pp.26-39 (2014)
반도체 소자용 구리 배선 형성을 위한 전해 도금
Electrodeposition for the Fabrication of Copper Interconnection in Semiconductor Devices
김명준, 김재정
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