Korean Chem. Eng. Res.
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ISSN 0304-128X
Online:
ISSN 2233-9558
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Issue
Total
1
articles [
키워드
:
Conformality
]
No.
Article
1
Korean Chemical Engineering Research
,
43
(1), pp.98-102 (2005)
CVD법에 의해 성막된 구리의 표면 형상 및 충진 특성에 관한 연구
Surface Morphology and Hole Filling Characteristics of CVD Copper
김덕수, 선우창신, 박돈희, et al.
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