Korean Chem. Eng. Res.
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ISSN 0304-128X
Online:
ISSN 2233-9558
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Issue
Total
1
articles [
저자
:
김완영
]
No.
Article
1
Korean Chemical Engineering Research
,
43
(1), pp.76-79 (2005)
Cl2/Ar 유도 결합 플라즈마를 이용한 NiFe, NiFeCo, Ta의 건식식각
Dry Etching of NiFe, NiFeCo, and Ta in Cl2/Ar Inductively Coupled Plasma
라현욱, 박형조, 김기주, et al.
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